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Other articles related with "synchronous pulse modulated"：
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45202 |
Chan Xue(薛婵), Fei Gao(高飞), Yong-Xin Liu(刘永新), Jia Liu(刘佳), You-Nian Wang(王友年) |
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Phase shift effects of radio-frequency bias on ion energy distribution in continuous wave and pulse modulated inductively coupled plasmas |
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Chin. Phys. B
2018 Vol.27 (4): 45202-045202
[Abstract]
(587)
[HTML 1 KB]
[PDF 1301 KB]
(234)
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